PN# 0195-02883

PRI CMP Wet Robot – Reflexion

*Available for Rebuild Only

PN# 04-101-PL-A07

Platen Rinse Interlock/Mirra 3400

*Available for Rebuild Only

PN# 04-101-PL-A061

UPPER PNEUMATIC TITAN / MIRRA 3400

*Available for Rebuild Only

PN# 0010-77184

UPPER PNEUMATIC TITAN / MIRRA 3400

*Available for Rebuild Only

PN# 0190-14775

FACILITIES PNEUMATICS PANEL / REFLEXION LK

*Available for Rebuild Only

PN# 0010-56921

AMAT 12″ CMP PAD CONDITIONER / REFLEXION LK

*Available for Rebuild Only

PN# 0020-79256

MIRRA CMP PAD CONDITIONER / MIRRA 3400

*Available for Rebuild Only

PN# 1080-00260

MOTOR SERVO AMPLIFIER / REFLEXION LK

*Available for Rebuild Only

PN# 0190-34538

TOKYO KEISO FLOW CONTROLLER / REFLEXION LK

*Available for Rebuild Only

PN# 1080-00275

DRVR SERVO MOTOR FOR 7.5KW MOTOR / REFLEXION LK

*Available for Rebuild Only

PN# 3970-00029

DRIVE RDCR PLANTARY GEARHEAD / REFLEXION LK

*Available for Rebuild Only

PN# 1080-00255

PLATEN ROTATION MOTOR / REFLEXION LK

*Available for Rebuild Only

PN# 0190-46576

HEAD ROTATION MOTOR DRIVERS / REFLEXION LK

*Available for Rebuild Only

PN# 0190-11332

HEAD ROTATION MOTOR / REFLEXION LK

*Available for Rebuild Only

PN# 04-101-PL-A05

MIRRA CMP UPA RETROFIT / MIRRA 3400

*Available for Rebuild Only

PN# 04-101-PL-A05

MIRRA CMP E-CHAIN RETROFIT / MIRRA 3400

*Available for Upgrade Only

PN# 04-101-PL-A04

MIRRA UPA VAC REJECTOR RETROFIT / MIRRA 3400

*Available for Rebuild Only

PN# 04-101-MS-A03

MESA BRUSH DIRECT LDM / MIRRA MESA

*Available for Rebuild Only

PN# 04-101-PL-A02

MIRRA CMP PAD CONDITIONER / MIRRA 3400

*Available for Rebuild Only

PN# 03-101-PL-A01

HEAD ROTATION DIRECT DRIVE MOTOR / MIRRA 3400

*Available for Rebuild Only

Repair Services

  • Robot and Blade
  • CVD Chamber
  • PVD Chamber
  • Lamp Module
  • P&C Chuck
  • Susceptor
  • Lift and Throttle

Load Door Repair

Heating Bellows

Equipment Serviced

LAM/Novellus

  • Concept One
    • Concept-one Altus (150,200MM)
    • Concept-One DCVD
  • Concept Two
    • Sequel STD/Shrink/Express
    • Altus STD/PNL/LRW
    • Speed STD/Shrink
  • Vector
    • Vector/Vector Express
  • Mach I
    • Vector Exel ALD Oxide
    • Vector Exel DB
  • MACH IV
    • Vector Extreme
  • MACH IQ
    • Strata Q
  • WTS
    • Concept Three
    • Speed NexT/Max
    • Altus MAX/LFW/PNL

Applied Materials

  • PVD
    • Endura
  • CVD
    • Centura
      • MxP/MxP+
    • Producer
    • P5000
      • MxP/MxP+

    Robot/Controller Repair

    • MAG7 (Altus/Speed)
    • ATR7/Controller (LAM)
    • AQT7/Controller (Novellus)
    • ATR8/Controller (Novellus/LAM)
    • ATR8 4 Axis (LAM)
    • Brooks PRI Prealigner
      • PRE-100
      • PRE-200
      • PRE-300
    • Rorze
      • RR700
      • RR701
      • RR711
      • RR713
      • RR717

    *Available for Rebuild Only

    ATM/VTM Controller Repair

    • AMAT XP
    • Yaskawa
      • XU-RC350S&D
      • XU6801
      • 6841
      • 7200
      • 7230
    • Kawasaki
      • 3NS410
      • 411
      • 510
    • ATR7/AQT7/Controller
    • ATR8/Controller

    *Available for Rebuild Only

    ElectroStatic Chuck Repair

    • AMAT
    • LAM
    • Novellus

    *Available for Rebuild Only

    EIOC & SIOC Repair

    • Vector
    • Vector Strata Q
    • Speed
    • Vector Extreme
    • Vector ALD
    • Altus

    *Available for Rebuild Only

    RF Matcher (ENI) Repair/Service

    • MWD-25LD-02

    *Available for Rebuild Only

    RF Matcher (AE) Repair/Service

    • Mercury3013
    • AZX-63
    • AZX-72
    • Navigator 1013
    • Navigator 3103
    • Navigator 5013
    • Navigator10013
    • DPS-Bias
    • DPS-Source

    *Available for Rebuild Only

    RF Matcher (AMAT) Repair/Service

    • C5200-BIAS
    • P5000-CVD
    • C5200-Metal
    • C5200- Metal HE
    • P5000-Oxide
    • C5200 Oxide-HE
    • C5200 Poly
    • C5200EMXP+Poly-HE
    • Endura5500
    • C5200-PVD-HE
    • ETCH MXP DPS
    • Vectra IMP Match

    *Available for Rebuild Only

    RF Matcher (LAM) Repair/Service

    • Ion Source Matcher

    *Available for Rebuild Only

    RF Matcher (TRAZAR) Repair/Service

    • RFDS-1
    • AMU10H
    • AMU10D-2
    • AMU10D-4F47
    • AMU2-1
    • AMU10E-2
    • SRN1-2
    • SRN2
    • SRN1-3
    • RFS1-3

    *Available for Rebuild Only

    RF Generator (ENI) Repair/Service

    • ACG-6B
    • LPG-12A
    • GW-2502MA
    • GMW-25A
    • GHW-50A
    • NOVA-50
    • PL-2HFN-01
    • OEM-6
    • OEM-6A
    • OEM-650A
    • OEM-12
    • OEM-12A
    • OEM-12B
    • OEM-1250
    • OEM-2000
    • OEM-50N
    • OEM-25B
    • OEM-28B

    *Available for Rebuild Only

    RF Generator (AE) Repair/Service

    • LF-5
    • RF-5S
    • LF-10A
    • RF10S
    • RF20R
    • RF20S
    • RF-30S
    • RF50
    • RFDS-1250
    • RFG-2150
    • RFG-1251
    • RFG-2000-2V
    • RFG3000
    • RFG-3001
    • RFG-3002
    • RFG5500
    • APEX-1513
    • APEX-5513
    • APEX-100013
    • PARAMOUNT1513
    • PARAMOUNT3013
    • PARAMOUNT PLUS VHF3060
    • PARAMOUNT PLUS VHF6060
    • PARAMOUNT PLUS MF15002

    *Available for Rebuild Only

    RF Generator (Comdel) Repair/Service

    • CLF-5000
    • CB-5000
    • CLX-2500
    • CLX-1250
    • CX-600
    • CPS-1001S/13

    RF Generator (DAIHEN) Repair/Service

    • DRFS-5SA, DRES-10SA
    • DRFS-15SA
    • AGA-27
    • WGA-30/50
    • MFG-155A
    • MFG-20SA

    *Available for Rebuild Only

    RF Generator (Kyosan) Repair/Service

    • R FX-20
    • R FX-30
    • R FK-50
    • R FX 100/200

    *Available for Rebuild Only

    Heating Bellows/Controller

    MIRRA CMP UPA RETROFIT / MIRRA 3400

    *Available for Rebuild Only

    Valve Repair

    • MIRRA CMP E-CHAIN RETROFIT / MIRRA 3400

    *Available for Upgrade Only

    PN# 04-101-PL-A04

    MIRRA UPA VAC REJECTOR RETROFIT / MIRRA 3400

    *Available for Rebuild Only

    PN# 04-101-MS-A03

    MESA BRUSH DIRECT LDM / MIRRA MESA

    *Available for Rebuild Only

    PN# 04-101-PL-A02

    MIRRA CMP PAD CONDITIONER / MIRRA 3400

    *Available for Rebuild Only

    PN# 03-101-PL-A01

    HEAD ROTATION DIRECT DRIVE MOTOR / MIRRA 3400

    *Available for Rebuild Only

    Chamber Upgrades

    Load Door Repair

    Heating Bellows

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