PN# 0010-77184

UPPER PNEUMATIC TITAN / MIRRA 3400

*Available for Rebuild Only

PN# 0190-14775

FACILITIES PNEUMATICS PANEL / REFLEXION LK

*Available for Rebuild Only

PN# 0010-56921

AMAT 12″ CMP PAD CONDITIONER / REFLEXION LK

*Available for Rebuild Only

PN# 0020-79256

MIRRA CMP PAD CONDITIONER / MIRRA 3400

*Available for Rebuild Only

PN# 1080-00260

MOTOR SERVO AMPLIFIER / REFLEXION LK

*Available for Rebuild Only

PN# 0190-34538

TOKYO KEISO FLOW CONTROLLER / REFLEXION LK

*Available for Rebuild Only

PN# 1080-00275

DRVR SERVO MOTOR FOR 7.5KW MOTOR / REFLEXION LK

*Available for Rebuild Only

PN# 3970-00029

DRIVE RDCR PLANTARY GEARHEAD / REFLEXION LK

*Available for Rebuild Only

PN# 1080-00255

PLATEN ROTATION MOTOR / REFLEXION LK

*Available for Rebuild Only

PN# 0190-46576

HEAD ROTATION MOTOR DRIVERS / REFLEXION LK

*Available for Rebuild Only

PN# 0190-11332

HEAD ROTATION MOTOR / REFLEXION LK

*Available for Rebuild Only

PN# 04-101-PL-A05

MIRRA CMP UPA RETROFIT / MIRRA 3400

*Available for Rebuild Only

PN# 04-101-PL-A05

MIRRA CMP E-CHAIN RETROFIT / MIRRA 3400

*Available for Upgrade Only

PN# 04-101-PL-A04

MIRRA UPA VAC REJECTOR RETROFIT / MIRRA 3400

*Available for Rebuild Only

PN# 04-101-MS-A03

MESA BRUSH DIRECT LDM / MIRRA MESA

*Available for Rebuild Only

PN# 04-101-PL-A02

MIRRA CMP PAD CONDITIONER / MIRRA 3400

*Available for Rebuild Only

PN# 03-101-PL-A01

HEAD ROTATION DIRECT DRIVE MOTOR / MIRRA 3400

*Available for Rebuild Only